師資介紹

吳國榮

發布者:姚芳發布時間:2022-10-14浏覽次數:1290

吳國榮(1990.08),男,博士,bat365中文官方网站登录入口bat365中文官方网站登录入口。長期從事微納結構濕法刻蝕的機理、加工及仿真研究。發表學術論文JMEMSJMM8篇。擔任《Journal of Microelectromechanical SystemsIEEE Transactions on Semiconductor Manufacturing》等學術期刊審稿人。

 

 

1.教育經曆

2017.09-2022.06東南大學,機械工程學院,博士研究生,導師:幸研教授

2014.09-2017.06江蘇科技大學,機械工程學院,碩士研究生,導師:高超教授

2010.09-2014.06江蘇師範大學,機電工程學院,本科學士

 

2.工作經曆

2022.08-至今,bat365中文官方网站登录入口,bat365中文官方网站登录入口,講師

 

3.研究方向

1晶體材料的濕法刻蝕機理

2微納結構的設計及加工

3微納結構的濕法刻蝕仿真

 

4.代表性論著

[1] Guorong Wu and Yan Xing. The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism. Journal of Microelectromechanical Systems, 2020, 29(5), 1234-1244. (SCI)

[2] Guorong Wu, Yan Xing, Ye Chen and Zai-Fa Zhou. Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire. Journal of Micromechanics and Microengineering, 2021, 31, 065001. (SCI)

[3] Guorong Wu, Miguel A. Gosalvez and Yan Xing. Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and Temperatures. Journal of Microelectromechanical Systems, 2022, 31(2), 249-264. (SCI)

[4] Guorong Wu, Yan Xing, Ye Chen and Zai-Fa Zhou. Analysis of etch profiles on C-plane wafers in wet etching of sapphire based on undercutting rate distributions in mixture of H2SO4 and H3PO4 at 236ºC. ECS Journal of Solid State Science and Technology, 2022, 11, 036003. (SCI)

[5] Guorong Wu, Yan Xing, Chen Fang, Jiabao Yao and Xiaohui Lin. Atomic structure method for the calculation of anisotropic wet etching rate of sapphire crystal. 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2020, 913-916. (EI)

[6] Yan Xing, Zhiyue Guo, Miguel A. Gosalvez, Guorong Wu and Xiaoli Qiu. Characterization of anisotropic wet etching of single-crystal sapphire. Sensors and Actuators A: Physical, 2020, 303, 111667. (SCI)

[7] Xi Lin, Chen Fang, Haoyang Liu, Guorong Wu, Yan Xing. Characterization and simulation of sputtering etched profile by focused gallium ion beam on GaN substrate. Materials & Design, 2022, 216, 110563. (SCI)

[8] Yan Xing, Zhiyue Guo, Guorong Wu and Miguel A. Gosalvez. Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, 281-284. (EI)

 

5.授權專利

[1] 一種用于加工氧化鋁陶瓷的高質量燒結金剛石鑽頭及其制備方法(專利号:ZL201810493082.6,已授權)

發明人:幸研,吳國榮,方晨

 

6.聯系方式

E-mail: wuguorongtz@qq.com


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